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SPIE Proceedings [SPIE International Symposium on Precision Engineering Measurement and Instrumentation - Changsha/Zhangjiajie, China (Friday 8 August 2014)] Ninth International Symposium on Precision Engineering Measurement and Instrumentation - Surface profile measurement of microstructures with steep slopes by sample-titling strategy
Cui, Junning, Tan, Jiubin, Wen, Xianfang, Xu, Bin, Chen, Wei, Huang, Yubo, Song, Kang, Zhao, ShipingVolume:
9446
Year:
2015
Language:
english
DOI:
10.1117/12.2180891
File:
PDF, 1.30 MB
english, 2015