![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Modeling Aspects in Optical Metrology V - Fourier analysis of quadratic phase interferograms
Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Muñoz-Maciel, Jesús, Mora-González, Miguel, Casillas-Rodríguez, Francisco J., Peña-Lecona, Francisco G.Volume:
9526
Year:
2015
Language:
english
DOI:
10.1117/12.2184889
File:
PDF, 667 KB
english, 2015