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SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Interferometry XIV: Techniques and Analysis - Laser confocal feedback profilometry
Wan, Xinjun, Schmit, Joanna, Creath, Katherine, Zhang, Shulian, Ren, Zhou, Towers, Catherine E.Volume:
7063
Year:
2008
Language:
english
DOI:
10.1117/12.792752
File:
PDF, 402 KB
english, 2008