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SPIE Proceedings [SPIE SPIE Europe Security and Defence - Cardiff, Wales, United Kingdom (Monday 15 September 2008)] Electro-Optical and Infrared Systems: Technology and Applications V - Investigations of reactively sputtered TiO 2-δ films for microbolometer applications
Kwon, Myung-Ho, Huckridge, David A., Ebert, Reinhard R., Yang, Keedong, Park, Yong-Su, Kim, Young-Ho, Chung, HanVolume:
7113
Year:
2008
Language:
english
DOI:
10.1117/12.800023
File:
PDF, 522 KB
english, 2008