SPIE Proceedings [SPIE SPIE Europe Microtechnologies for the New Millennium - Dresden, Germany (Monday 4 May 2009)] Photonic Materials, Devices, and Applications III - Design and fabrication of Si-based photonic crystal stamps with electron beam lithography (EBL)
Jannesary, Reyhaneh, Serpenguzel, Ali, Bergmair, Iris, Zamiri, Saeid, Hingerl, Kurt, Hubbard, Graham, Abbott, Steven, Chen, Qin, Allsopp, DuncanVolume:
7366
Year:
2009
Language:
english
DOI:
10.1117/12.820808
File:
PDF, 4.60 MB
english, 2009