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SPIE Proceedings [SPIE SPIE Europe Microtechnologies for the New Millennium - Dresden, Germany (Monday 4 May 2009)] Smart Sensors, Actuators, and MEMS IV - Micromechanical sensors based on lateral and longitudinal displacement of a cantilever sensing element: a comparative performance study
Matović, Jovan, Schmid, Ulrich, Jakšić, ZoranVolume:
7362
Year:
2009
Language:
english
DOI:
10.1117/12.821655
File:
PDF, 302 KB
english, 2009