SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III - Precision glass molding: an integrative approach for the production of high precision micro-optics
Schoenfeld, Winston V., Hünten, Martin, Klocke, Fritz, Wang, Jian J., Loncar, Marko, Dambon, Olaf, Suleski, Thomas J.Volume:
7591
Year:
2010
Language:
english
DOI:
10.1117/12.840271
File:
PDF, 4.96 MB
english, 2010