SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 21 August 2011)] Dimensional Optical Metrology and Inspection for Practical Applications - Design and characterization of an image acquisition system and its optomechanical module for chip defects inspection on chip sorters
Chen, Ming-Fu, Huang, Po-Hsuan, Chen, Yung-Hsiang, Cheng, Yu-ChengVolume:
8133
Year:
2011
Language:
english
DOI:
10.1117/12.893334
File:
PDF, 2.21 MB
english, 2011