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SPIE Proceedings [SPIE Seventh International Symposium on Precision Engineering Measurements and Instrumentation - Yunnan, China (Sunday 7 August 2011)] Seventh International Symposium on Precision Engineering Measurements and Instrumentation - An embedded image processing and feedback compensation for the vibration-resistance system using white light interferometer
Tseng, Stephen P., Fan, Kuang-Chao, Song, Man, Chen, Liang-Chia, Ho, Calvin, Lu, Rong-Sheng, Sheng, Chih-YangVolume:
8321
Year:
2011
Language:
english
DOI:
10.1117/12.905061
File:
PDF, 1.49 MB
english, 2011