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Optimizing Middle of Line (MoL) Contact Cleaning to Preserve Tungsten (W) Integrity in Advanced Technology Nodes
Singh, S., Muralidhar, P., Das, K., Scott, S.Volume:
69
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06908.0301ecst
Date:
October, 2015
File:
PDF, 260 KB
english, 2015