Optimizing Middle of Line (MoL) Contact Cleaning to...

Optimizing Middle of Line (MoL) Contact Cleaning to Preserve Tungsten (W) Integrity in Advanced Technology Nodes

Singh, S., Muralidhar, P., Das, K., Scott, S.
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Volume:
69
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06908.0301ecst
Date:
October, 2015
File:
PDF, 260 KB
english, 2015
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