[IEEE 2015 IEEE Advanced Information Technology, Electronic and Automation Control Conference (IAEAC) - Chongqing, China (2015.12.19-2015.12.20)] 2015 IEEE Advanced Information Technology, Electronic and Automation Control Conference (IAEAC) - Hoop stress development on silicon dioxide liner in through silicon via
Atieno, Juma Mary, Zhang, Xuliang, Bai, He SongYear:
2015
DOI:
10.1109/iaeac.2015.7428601
File:
PDF, 627 KB
2015