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[IEEE 2014 International Conference on Planarization/CMP Technology (ICPT) - Kobe, Japan (2014.11.19-2014.11.21)] Proceedings of International Conference on Planarization/CMP Technology 2014 - Tackling hillocks growth after aluminum CMP
Muller, M. R., Kallis, K., Menzel, S., Kunzelmann, U., Petrov, I., Knoch, J.Year:
2014
Language:
english
DOI:
10.1109/icpt.2014.7017263
File:
PDF, 1.09 MB
english, 2014