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[IEEE 2014 IEEE Sensors - Valencia, Spain (2014.11.2-2014.11.5)] IEEE SENSORS 2014 Proceedings - Force-compensating MEMS sensor for AFM cantilever stiffness calibration
Bulut Coskun, M., Moore, Steven, Reza Moheimani, S.O., Neild, Adrian, Alan, TuncayYear:
2014
Language:
english
DOI:
10.1109/icsens.2014.6985361
File:
PDF, 1.42 MB
english, 2014