Temperature Control for Nano-Scale Films by...

IEEE Transactions on Nanotechnology 2015 / 11 Vol. 14; Iss. 6

Temperature Control for Nano-Scale Films by Spatially-Separated Atomic Layer Deposition Based on Generalized Predictive Control

He, Wen-Jie, Zhang, Hai-Tao, Chen, Zhiyong, Lin, Ji-Long, Tian, Kan, Shan, Bin, Chen, Rong
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
14
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2015.2471298
Date:
November, 2015
File:
PDF, 1.27 MB
english, 2015
Conversion to is in progress
Conversion to is failed