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A visual non-contact focusing probe for the measurement of micro cavities
Zhang, Ke, Zhang, Qing, Lin, Chi Duen, Fan, Kuang ChaoVolume:
11
Year:
2015
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/IJNM.2015.071928
File:
PDF, 533 KB
english, 2015