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[IEEE 2015 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2015.3.15-2015.3.16)] 2015 China Semiconductor Technology International Conference - Metal layer PWOPC solution for 28nm node and beyond
Dan Wang,, Shirui Yu,, Zhibiao Mao,, Xiang Wang,, Yanpeng Chen,Year:
2015
Language:
english
DOI:
10.1109/cstic.2015.7153339
File:
PDF, 500 KB
english, 2015