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[IEEE 2000 22nd International Conference on Microelectronics. Proceedings - Nis, Yugoslavia (14-17 May 2000)] 2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400) - Dielectric characteristics of MOS capacitors with rf sputtered Ta/sub 2/O/sub 5/
Dimitrova, T., Atanassova, E., Koprinarova, J.Volume:
1
Year:
1999
Language:
english
DOI:
10.1109/icmel.2000.840592
File:
PDF, 310 KB
english, 1999