![](/img/cover-not-exists.png)
[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Multifunctional tool for expanding AFM-based applications
Deladi, S., Tas, N.R., Krijnen, G.J.M., Elwenspoek, M.C.Volume:
1
Year:
2005
Language:
english
DOI:
10.1109/sensor.2005.1496383
File:
PDF, 683 KB
english, 2005