[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - High-power mems relay array with improved reliability and consistency

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