Effects of boundary conditions in the dynamic model of the...

Effects of boundary conditions in the dynamic model of the RF sheath

Sternberg, N., Godyak, V.A.
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Volume:
30
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.312593
Date:
January, 1994
File:
PDF, 310 KB
english, 1994
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