A Vapor Phase Self-Assembly of Porphyrin Monolayer as a...

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IEEE Transactions on Electron Devices 2016

A Vapor Phase Self-Assembly of Porphyrin Monolayer as a Copper Diffusion Barrier for Back-End-of-Line CMOS Technologies

Naik, Tejas R., Singh, Vibhas, Ravikanth, M., Rao, V. Ramgopal
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Year:
2016
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2016.2537370
File:
PDF, 1.64 MB
english, 2016
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