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[IEEE 2004 IEEE International Conference on Systems, Man and Cybernetics - The Hague, Netherlands (10-13 Oct. 2004)] 2004 IEEE International Conference on Systems, Man and Cybernetics (IEEE Cat. No.04CH37583) - Using a self-organizing neural network for wafer defect inspection
Chuan-Yu Chang,, Jia-Wei Chang,, MuDer Jeng,Volume:
5
Year:
2004
Language:
english
DOI:
10.1109/icsmc.2004.1401209
File:
PDF, 492 KB
english, 2004