[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - In-line characterization of preamorphous implants (PAI)
Borden, P., Ferguson, C., Sing, D., Larson, L., Bechtler, L., Jones, K., Gable, P.Year:
2000
Language:
english
DOI:
10.1109/iit.2000.924233
File:
PDF, 277 KB
english, 2000