[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - Channel flow network at low electric field with high flow resistance compensation pattern
Yongwon Jeong,, Yongsuk Han,, Songyi Kim,, Haehyung Lee,, Jun Keun Chang,, Dongil Dan Cho,, Doo Soo Chung,, Kukjin Chun,Year:
2003
Language:
english
DOI:
10.1109/memsys.2003.1189778
File:
PDF, 271 KB
english, 2003