Texture-related roughness of (Nb,Ti)N sputter-deposited films
Iosad, N.N., van der Pers, N.M., Grachev, S., Zuiddam, M., Jackson, B.D., Dmitriev, P.N., Klapwijk, T.M.Volume:
13
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/tasc.2003.812296
Date:
June, 2003
File:
PDF, 1.91 MB
english, 2003