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Optimizing hybrid metrology: rigorous implementation of Bayesian and combined regression
Henn, Mark-Alexander, Silver, Richard M., Villarrubia, John S., Zhang, Nien Fan, Zhou, Hui, Barnes, Bryan M., Ming, Bin, Vladár, András E.Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.14.4.044001
Date:
November, 2015
File:
PDF, 4.64 MB
english, 2015