Radial-quality uniformity investigations of large-area thick Al films
Yang, Haigui, Li, Zizheng, Wang, Xiaoyi, Shen, Zhenfeng, Gao, Jinsong, Zhang, ShanwenVolume:
54
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.oe.54.4.045106
Date:
April, 2015
File:
PDF, 2.39 MB
english, 2015