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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Optical vibration analysis of MEMS devices with pm-resolution in x, y, and z directions
Giesen, Moritz, Lehmann, Peter H., Osten, Wolfgang, Kowarsch, Robert, Ochs, Wanja, Albertazzi, Armando, Winter, Marcus, Rembe, ChristianVolume:
8788
Year:
2013
Language:
english
DOI:
10.1117/12.2019342
File:
PDF, 1.46 MB
english, 2013