SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Phase information in coherent Fourier scatterometry
Kumar, N., Lehmann, Peter H., Osten, Wolfgang, El Gawhary, O., Roy, S., Albertazzi, Armando, Pereira, S. F., Urbach, H. P.Volume:
8788
Year:
2013
Language:
english
DOI:
10.1117/12.2020506
File:
PDF, 724 KB
english, 2013