SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Measurement of aspheres and free-form surfaces in a non-null test interferometer: reconstruction of high-frequency errors
Baer, Goran, Lehmann, Peter H., Osten, Wolfgang, Schindler, Johannes, Siepmann, Jens, Albertazzi, Armando, Pruß, Christof, Osten, Wolfgang, Schulz, MichaelVolume:
8788
Year:
2013
Language:
english
DOI:
10.1117/12.2021518
File:
PDF, 635 KB
english, 2013