![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Smart optical writing head design for laser-based manufacturing
Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Amin, M. Junaid, Riza, Nabeel A.Volume:
8967
Year:
2014
Language:
english
DOI:
10.1117/12.2038352
File:
PDF, 608 KB
english, 2014