![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser-based Micro- and Nanoprocessing IX - High performance light trapping structures for Si-based photoelectronics fabricated by hybrid picosecond laser irradiation and chemical corrosion
Klotzbach, Udo, Washio, Kunihiko, Arnold, Craig B., Ji, Lingfei, Lv, Xiaozhan, Wu, Yan, Lin, Zhenyuan, Jiang, YijianVolume:
9351
Year:
2015
Language:
english
DOI:
10.1117/12.2077959
File:
PDF, 829 KB
english, 2015