SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Extreme Ultraviolet (EUV) Lithography VI - EUV contact holes and pillars patterning

Wood, Obert R., Panning, Eric M., Park, Sarohan, De Simone, Danilo, Tao, Zheng, Vandenberghe, Geert, Hyun, Yoonsuk, Kim, Seo-Min, Lim, Chang-Moon
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Volume:
9422
Year:
2015
Language:
english
DOI:
10.1117/12.2085920
File:
PDF, 1.29 MB
english, 2015
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