SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Extreme Ultraviolet (EUV) Lithography VI - High-radiance LDP source for mask-inspection application

Wood, Obert R., Panning, Eric M., Teramoto, Yusuke, Santos, Bárbara, Mertens, Guido, Kops, Ralf, Kops, Margarete, von Wezyk, Alexander, Yabuta, Hironobu, Nagano, Akihisa, Shirai, Takahiro, Ashizawa, N
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Volume:
9422
Year:
2015
Language:
english
DOI:
10.1117/12.2086606
File:
PDF, 905 KB
english, 2015
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