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SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Optical Measurement Systems for Industrial Inspection IX - Robust vertical scanning white-light interferometry in close-to-machine applications
Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Tereschenko, Stanislav, Lehmann, Peter, Gollor, Pascal, Kuehnhold, PeterVolume:
9525
Year:
2015
Language:
english
DOI:
10.1117/12.2184024
File:
PDF, 1.13 MB
english, 2015