SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Optical Measurement Systems for Industrial Inspection IX - Quantifying height of machined steps on copper disk using Fourier domain short coherence interferometer
Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Montonen, Risto, Kassamakov, Ivan, Hæggström, Edward, Österberg, KennethVolume:
9525
Year:
2015
Language:
english
DOI:
10.1117/12.2184715
File:
PDF, 529 KB
english, 2015