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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser-based Micro- and Nanoprocessing X - Analysis of process parameter for the ablation of optical glasses with femto- and picosecond laser pulses
Klotzbach, Udo, Washio, Kunihiko, Arnold, Craig B., Schindler, Christian, Friedrich, Maria, Bliedtner, JensVolume:
9736
Year:
2016
Language:
english
DOI:
10.1117/12.2212826
File:
PDF, 556 KB
english, 2016