SPIE Proceedings [SPIE Microelectronic Manufacturing '95 -...

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SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX, United States (Wednesday 25 October 1995)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis - Degradation of thin Si0 2 sidewall spacers during selective epitaxial growth for the fabrication of raised source/drain MOSFETs

Unnikrishnan, Sreenath, Kim, Byeong Y., Wang, Chun-Lin, Wu, Yun-Kang, Kwong, Dim-Lee, Tasch, Al F.
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Volume:
2635
Year:
1995
Language:
english
DOI:
10.1117/12.221456
File:
PDF, 513 KB
english, 1995
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