SPIE Proceedings [SPIE Optical Instrumentation & Systems Design - Glasgow, United Kingdom (Sunday 12 May 1996)] Developments in Optical Component Coatings - Plasma-ion-assisted deposition: investigation of film stress
Zoeller, Alfons, Goetzelmann, Rainer, Matl, K.Volume:
2776
Year:
1996
Language:
english
DOI:
10.1117/12.246816
File:
PDF, 393 KB
english, 1996