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SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Optical Fabrication, Testing, and Metrology II - Critical dimension metrology using optical diffraction microscopy
Agersnap, Niels, Hansen, Poul-Erik, Petersen, Jan C., Garnæs, Jørgen, Destouches, Nathalie, Parriaux, OlivierVolume:
5965
Year:
2005
Language:
english
DOI:
10.1117/12.624769
File:
PDF, 380 KB
english, 2005