Introduction of SiGe/Si heterojunction into novel multilayer tunnel FinFET
Morita, Yukinori, Fukuda, Koichi, Mori, Takahiro, Mizubayashi, Wataru, Migita, Shinji, Endo, Kazuhiko, O’uchi, Shin-ichi, Liu, Yongxun, Masahara, Meishoku, Matsukawa, Takashi, Ota, HiroyukiVolume:
55
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.04EB06
Date:
April, 2016
File:
PDF, 1.85 MB
2016