High conductivity indium doped ZnO films by metal target reactive co-sputtering
Singh, Anil, Chaudhary, Sujeet, Pandya, D.K.Volume:
111
Journal:
Acta Materialia
DOI:
10.1016/j.actamat.2016.03.012
Date:
June, 2016
File:
PDF, 2.88 MB
2016