Oxygen effect on characteristics of a PGMA resist

Yoshio Taniguchi, Tadao Kaneko, Toshio Nakano, Michiaki Hashimoto, Akira Sasano, Ken Tsutsui, Kiyotake Naraoka

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Volume:

Year:

1982

Language:

english

Pages:

DOI:

10.1002/app.1982.070270327

File:

PDF, 176 KB

english, 1982

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