Applications of scanning optical microscopy in materials...

Journal of Microscopy 1997 Vol. 188; Iss. 1

Applications of scanning optical microscopy in materials science to detect bulk microdefects in semiconductors

P. Török, L. Mule'Stagno
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Volume:
188
Year:
1997
Language:
english
Pages:
16
DOI:
10.1046/j.1365-2818.1997.2420800.x
File:
PDF, 1.78 MB
english, 1997
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