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[IEEE 2015 IEEE 12th International Conference on Group IV Photonics (GFP) - Vancouver, BC, Canada (2015.8.26-2015.8.28)] 2015 IEEE 12th International Conference on Group IV Photonics (GFP) - Ultra-fme Si photonics fabrication technology based on 40-nm-node CMOS process
Horikawa, Tsuyoshi, Mogami, TohruYear:
2015
DOI:
10.1109/group4.2015.7305911
File:
PDF, 4.33 MB
2015