Design of a Decentralized Controller for a Glass RTP System

IEEE Transactions on Semiconductor Manufacturing 2016 / 2 Vol. 29; Iss. 1

Design of a Decentralized Controller for a Glass RTP System

Lee, Byeong Hyeon, Kim, Junghwan, Ji, Sanghyun, Lee, Sungyong, Lee, Kwang Soon
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Volume:
29
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2015.2513416
Date:
February, 2016
File:
PDF, 1.06 MB
2016
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