SPIE Proceedings [SPIE Sixth International Symposium on Precision Mechanical Measurements - Guiyang, China (Thursday 8 August 2013)] Sixth International Symposium on Precision Mechanical Measurements - Structure design and characteristic analysis of micro-nano probe based on six dimensional micro-force measuring principle
Yang, Hong-tao, Cai, Chun-mei, Fang, Chuan-zhi, Wu, Tian-feng, Ye, Shenghua, Fei, YetaiVolume:
8916
Year:
2013
DOI:
10.1117/12.2035715
File:
PDF, 489 KB
2013