SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Optical Measurement Systems for Industrial Inspection VI - Polarized optical scattering measurements of metallic nanoparticles upon a silicon wafer
Liu, Cheng-Yang, Lehmann, Peter H., Fu, Wei-EnVolume:
7389
Year:
2009
Language:
english
DOI:
10.1117/12.825716
File:
PDF, 518 KB
english, 2009