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SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Optical Measurement Systems for Industrial Inspection VI - Soft x-ray projection system for robust roundness measurements
Volk, Raimund, Lehmann, Peter H., Neumann, Ernst, Warrikhoff, Alexander, Hanke, Randolf, Kasperl, Stefan, Funk, Christoph, Hiller, Jochen, Krumm, Michael, Acharya, Sudarsan, Sukowski, Frank, Uhlmann,Volume:
7389
Year:
2009
Language:
english
DOI:
10.1117/12.827330
File:
PDF, 839 KB
english, 2009