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SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Optical Measurement Systems for Industrial Inspection VI - Development of an ultrasensitive interferometry system as a key to precision metrology applications
Gohlke, Martin, Lehmann, Peter H., Schuldt, Thilo, Weise, Dennis, Johann, Ulrich, Peters, Achim, Braxmaier, ClausVolume:
7389
Year:
2009
Language:
english
DOI:
10.1117/12.827586
File:
PDF, 1.43 MB
english, 2009